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Тезисы докладов
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- 2012 The charging of PMMA-film resist in electron beam lithography
- Evstafjeva E.N., Knjazev M.A., Rau E.I., Svintsov A.A., Tatarintsev A.A., Zaitsev S.I.
- в сборнике International Conference “Micro- and Nanoelectronics – 2012”. Abstr. Book, место издания Moscow-Zvenigorod, Russia, 1-5 October, тезисы, с. P2-25