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Статьи в журналах
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- 2024 Challenges in scaling of IPVD deposited Ta barriers on OSG low-k films: Carbonization of Ta by CHx radicals generated through VUV-induced decomposition of carbon-containing groups
- Ryabinkin Alexey N., Vishnevskiy Alexey S., Naumov Sergej, Serov Alexander O., Maslakov Konstantin I., Seregin Dmitry S., Vorotyntsev Dmitry A., Pal Alexander F., Rakhimova Tatyana V., Vorotilov Konstantin A., Baklanov Mikhail R.
- в журнале Plasma Processes and Polymers, издательство Wiley - V C H Verlag GmbbH & Co. (Germany), том 21, № 5 DOI
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- 2022 Modification of Porous Ultralow-k Film by Vacuum Ultraviolet Emission
- Zotovich Alexey I., Zyryanov Sergey M., Lopaev Dmitry V., Rezvanov Askar A., Attallah Ahmed G., Liedke Maciej O., Butterling Maik, Bogdanova Maria A., Vishnevskiy Alexey S., Seregin Dmitry S., Vorotyntsev Dmitry A., Palov Alexander P., Hirschmann Eric, Wagner Andreas, Naumov Sergej, Vorotilov Konstantin A., Rakhimova Tatyana V., Rakhimov Alexander T., Baklanov Mikhail R.
- в журнале ACS Applied Electronic Materials, издательство American Chemical Society (United States), том 4, № 6, с. 2760-2776 DOI